Infrastrukturliste
| Institutskennziffer (IKZ) | Bezeichnung der übergeordneten Forschungsinfrastruktur | Art des Gerätes | Hersteller | Zusätzliche Methoden und Synergien mit anderen Geräten | Modell |
|---|---|---|---|---|---|
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Oxford Instruments Plasma Technology | FlexAL (tool 1) | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Oxford Instruments Plasma Technology | FlexAL (tool 2) | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Oxford Instruments Plasma Technology | PlasmaPro 100 (tool 1) | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Oxford Instruments Plasma Technology | Nanofab | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | INOTHERM | LDS-200-2 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | SENTECH | Depolab 200 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Oxford Instruments Plasma Technology | PlasmaPro 100 (tool 2) | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | SCS | PDS2010 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | scia Systems | scia Coat 200 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Nordiko | NS2550 (tool 1, refurbished) | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Nordiko | NS2550 (tool 2, refurbished) | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Leybold | A700QE (refurbished) | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Balzers | PLS 500 (refurbished) | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | CREAVAC | CREAMET 450 CI2 ebeam | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Quorum Technologies | Q150RS Plus | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Fischione Instruments | Model 1020 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | VON ARDENNE | LS4001 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | RAITH | RAITH150 Two | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | RAITH | E-LINE | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | MICROTECH | LW405C | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Nanonex | NX-2500 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | SUSS MicroTec | MA/BA6 (tool 1) | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | SUSS MicroTec | MA/BA6 (tool 2) | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | SUSS MicroTec | MA/BA8 Gen 4 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | SUSS MicroTec | RCD8 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | SAWATEC | SM-180 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Annealsys | AS-One 150 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Annealsys | AS-Master S20 HT | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | UniTemp | RTP 150 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | INOTHERM | LDS-200-2 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | centrotherm | E1200 HT210-4 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Jura | WE8 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | TPT Wire Bonder | HB16 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Delvotec | 5410 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Finetech | lambda | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Kulicke & Soffa | 4123 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Kulicke & Soffa | 4127 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Hesse Mechatronik | BJ653 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | AMICRA | NANO | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | SÜSS MicroTec | SB6e | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | ESEC | 8002 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | DISCO | DAD 320 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | DISCO | DAD 321 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Dage | 2400PC | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Oxford Instruments Plasma Technology | RIE 80 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | STRASBAUGH | 6EC | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Oxford Instruments Plasma Technology | PlasmaPro 100 Cobra (tool 4) | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Oxford Instruments Plasma Technology | PlasmaPro 100 (tool 3) | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | LOGITECH | PM5 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Oxford Instruments Plasma Technology | Plasmalab PRS 90 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Cressington | 208HR / mtm20 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Idonus Sarl | VPE-150 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Oxford Instruments Plasma Technology | PlasmaPro 100 Cobra (tool 1) | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Oxford Instruments Plasma Technology | PlasmaPro 100 Cobra (tool 2) | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Oxford Instruments Plasma Technology | PlasmaPro 100 Cobra (tool 3) | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | scia Systems | scia Coat 200 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | SENTECH | SI591 Reverse | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | SENTECH | SI591 Reverse | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Bruker | TriboLab CMP | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Diener electronic | Nano | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Diener electronic | Nano | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Annealsys | AS-One 150 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Annealsys | AS-Master S20 HT | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | HMR Reinraum- und Labortechnik | WB-FH 008-8 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | arias | WB-FH 001-3 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | KISSLER | WB-LF 008-2 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | arias | WB-LF 008-3 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | arias | WB-LF 008-4 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | arias | WB-LF 008-5 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | arias | WB-LF 008-6 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | arias | WB-LF 008-7 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | -- | WB-LF 009-1 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | KISSLER | WB-LF 009-2 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | arias | WB-LF 009-3 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | arias | WB-LF xxx-1 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | arias | WB-LF xxx-2 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | arias | WB-LF 001-1 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | arias | WB-LF 001-2 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | arias | WB-LF 001-4 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | KISSLER | WB-LF 008-1 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | ZEISS | Axiotron | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Leitz Ergolux | 20 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Leitz Ergolux | AMC | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Res-Tec GmbH | RT 2500 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | ZEISS | A1 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | HP | 4294A | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Ocean Optics | HR2000+ | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | VersaStat | 3 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | HP | 8712B | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Luigs Neumann | EPC-9 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Jasco | FP-8300 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | ZEISS | Axioscope | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Nikon | Eclipse L 150 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Karl SÜSS | -- | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Vision Engineering | Lynx Stereo-Dynascope | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Novocontrol | -- | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Sciospec | ISX-3 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | HP | -- | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Solartron | SI 1260 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Solartron | SI 1260 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | EG&G | Modell 283 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | EG&G | Modell 263A | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Keithley | 4200A-SCS | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Holland Shielding | 2mx2mx2.3m | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Malvern Panalytical | X`Pert pro | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Cryovac / Kammrath & Weiss | KONTI Kryostat | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Cascade Microtech | Summit 9000 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | WEP | CVP21 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Ecopia | HMS 5000 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Renishaw | inVia | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Hewlett-Packard | HP 4156A | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Keithley | 4200A-SCS | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Hewlett-Packard | HP 4284A | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | ZEISS | Sigma | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | AMETEK | EDAX Octane Elect | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | SunLab | Sherescan | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | InfraTec | PV-LIT | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | PerkinElmer | Lambda 950 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Keyence | VK-X 200 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Accurion (now: Park Systems) | nanofilm_ep4se | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Bruker | DektakXT | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | ORIEL | Sol3A | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Hiden Analytical | HAL IMP/301/3F | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Verity Instruments | SD2048GH | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | KLA Instruments | Tencor P-17 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Keyence | VK-X3000 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Keyence | VHX-7000 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Park Systems | Park NX20 | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Carl Zeiss Microscopy | Axiolab 5 KMAT | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Multi Channel Systems MCS | CMOS-MEA5000-System | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Molecular Vista | Vista One | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Molecular Vista | Vista One | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Molecular Vista | Vista One | |
| ZMNT – Central Laboratory for Micro- and Nanotechnology | Sonstiges/Other | Sonstiges/Other | Molecular Vista | Vista One |
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