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Eintrag

Kategorie:
Mikroskope

Art des Gerätes:
Dual-beam microscope (SEM/FIB)

Bezeichnung der übergeordneten Forschungsinfrastruktur (optional):
Thermo Fisher Helios Hydra 5 UX (StrucMatLab)

Zusätzliche Methoden und Synergien mit anderen Geräten (optional):
EDS, EBSD

Identifikationsnummer (optional):
9955821

Kurze Beschreibung des Gerätes (maximal 5000 Zeichen):
The dual-beam microscope Helios 5 Hydra UX, manufactured by Thermo Fisher Scientifc, is operated within StrucMatLab at Materials Chemistry since 2022 and equipped with the combination of a field emission electron source and a plasma ion source. The plasma source allows for gas selection of xenon, argon, oxygen and nitrogen. Xenon is significantly larger and heavier than gallium and together with ion beam currents of up to 2.5 μΑ the material removal rate is 40 times larger compared to gallium. Thus, the microscope is primarily used for the analysis of large volumes with dimensions of up to ~500 μm length, ~500 μm width as well as ~300 μm height. Moreover, the available gases are beneficial for preparation of atom probe specimens, thin lamellae, cantilevers and micropillars from materials, which are sensitive to gallium incorporation such as aluminum or magnesium.

Hersteller:
Thermo Fisher Scientific

Jahr des Erwerbs (optional):
2021

Modell:
Helios Hydra 5 UX

Notwendige / einschränkende Rahmenbedingungen für den Einsatz (optional):
Solid, conductive and non-conductive (limited)

Nutzergruppen:
Interne

Art der Nutzung:
Dienstleistung und Anwender*in

Fakultät:

• Faculty 5 – Georesources and Materials Engineering

Fachgruppe / Lehreinheit (optional):
Materials Science and Engineering

Institutskennziffer (IKZ):
StrucMatLab / Materials Chemistry

Website (optional)
https://www.strucmatlab.rwth-aachen.de/cms/strucmatlab/Aktivitaeten/~bkzbvu/Fokussierter-Ionenstrahl-Plasma-/lidx/1/

Adresse (optional):
Kopernikusstr. 10, 52074 Aachen

Ansprechpartner*in:
Dr. Marcus Hans

E-Mailadresse (optional):
hans@mch.rwth-aachen.de